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E17000 - SEMI E170 - Specification for Secured Foundation Of Recipe Ma

E17000 - SEMI E170 - Specification for Secured Foundation Of Recipe Ma

The purpose of this Standard is to provide a standardized ‘secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment’ which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones. The purpose of this Standard is to provide a standardized ‘